Title:
PRODUCTION OF THIN LEAD TITANATE ZIRCONATE FILM
Document Type and Number:
Japanese Patent JPH0987095
Kind Code:
A
Abstract:
To industrially and easily produce a thin lead titanate zirconate film having satisfactory crystallinity and a stoichiometric compsn.
A thin oxide film preferably of 0.05-2μm thickness contg. Ti and Zr is previously formed on a substrate and it is heated preferably at 600-1,200°C in an atmosphere of lead oxide. It is not necessary to consider the feed of Pb at the time of film formation and the objective thin lead titanate zirconate film having satisfactory crystallinity and a stoichiometric compsn. is easily produced.
Inventors:
ABE TAKAYUKI
Application Number:
JP24138495A
Publication Date:
March 31, 1997
Filing Date:
September 20, 1995
Export Citation:
Assignee:
SUMITOMO METAL MINING CO
International Classes:
C30B29/32; C30B33/02; H01L37/02; H01L41/187; H01L41/39; (IPC1-7): C30B29/32; C30B33/02; H01L37/02; H01L41/187; H01L41/24
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