PRODUCTION OF THIN OXIDE FILM BY COATING METHOD

Title:

PRODUCTION OF THIN OXIDE FILM BY COATING METHOD

Document Type and Number:

Japanese Patent JP3127849

Kind Code:

B2

Abstract:

PROBLEM TO BE SOLVED: To improve safety by dissolving organometallic compds. in a specified solvent, coating the top of a substrate with the resultant soln. and forming a thin oxide film by heat treatment.
SOLUTION: Two or more of organometallic compds. separately contg. Pb, Zr, Ti, Sr, Bi and Ta are dissolved in a solvent based on 1-methoxy-2-propanol and/or 1-ethoxy-2-propanol to prepare a soln. The organometallic compds; are, e.g. Pb(OAc)2, Zr(OEt)4, Ti(O-iPr)4, Sr(OPr)2, Bi(O-iPr)3 and Ta(OEt)5. Ethyl lactate is added to the soln. if necessary and the top of a substrate is coated with the soln. and the objective thin oxide film of Pb(Zr,Ti)O3, PbTiO3 or SrBi2 Ta2Oo is formed by heat treatment.

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Inventors:

Takashi Hase

Application Number:

JP2495497A

Publication Date:

January 29, 2001

Filing Date:

February 07, 1997

Export Citation:

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Assignee:

NEC

International Classes:

C01G23/00; C01G35/00; C23C26/00; H01G7/06; (IPC1-7): C01G23/00; C01G35/00; C23C26/00; H01G7/06

Domestic Patent References:

JP5197137A
JP2196749A
JP94570A

Attorney, Agent or Firm:

Naoki Kyomoto (2 outside)

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