PURPOSE: To apply compression stress to the electromechanical conversion element of an ultrasonic actuator even at the time of resonation.
CONSTITUTION: Lamination type electromechanical conversion elements 12, 13 are arranged on the shoulder parts 9a, 9b of a resonator 9 in the state brought into contact with the vertical surfaces 10 of the projection 11 of the heated resonator 9 and holding members 16, 17 are pressed to the outer end surfaces of the electromechanical conversion elements 12, 13 and fixed to the resonator 9 by bolts 18, 19 to constitute an ultrasonic vibrator and, thereafter, the ultrasonic vibrator is naturally cooled to the ordinary temp. At the time of cooling, the resonator 9 is shrunk and, as the counteraction of this shrinkage, compression stress is applied to the electromechanical conversion elements 12, 13.
FUNAKUBO TOMOKI
TSUBATA TOSHIHARU
TANIGUCHI YOSHIHISA
OUCHI KOJI
