Title:
PRODUCTION OF AND PRODUCTION UNIT FOR OXIDE SUPERCONDUCTING THIN FILM
Document Type and Number:
Japanese Patent JP3944963
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a method for producing the subject thin film and a production unit therefor, enabling the aimed high-quality oxide superconducting thin film to be formed uniformly on both sides of a substrate even in the case of the large-area single crystal substrate ≥1 inch in diameter.
SOLUTION: The method and production unit therefor is intended for forming an oxide superconducting thin film on a single crystal substrate by thin film growth process; wherein, when the substrate 3 is to be heated using beams from a heat source 21, beams transmitted without being absorbed to the substrate 3 among the beams emitted from the heat source 21 are reflected using a mask 1 and the energy of beams absorbed to the mask 1 is radiated so as to contribute to heating the substrate 3 again.
Inventors:
Gozo Fujino
Masaya Konishi
Masaya Konishi
Application Number:
JP23137897A
Publication Date:
July 18, 2007
Filing Date:
August 27, 1997
Export Citation:
Assignee:
Sumitomo Electric Industries, Ltd.
International Classes:
C01G1/00; C30B29/22; C01G3/00; H01B13/00; H01L39/24; (IPC1-7): C30B29/22; C01G1/00; C01G3/00; H01B13/00; H01L39/24
Domestic Patent References:
| JP8243380A | ||||
| JP61502433A | ||||
| JP61215290A | ||||
| JP9505798A |
Attorney, Agent or Firm:
Kuro Fukami
Toshio Morita
Hidehiko Ito
Toshio Morita
Hidehiko Ito