Title:
進行波形マイクロ波プラズマ発生装置
Document Type and Number:
Japanese Patent JP4862375
Kind Code:
B2
Inventors:
Eiji Tanabe
Application Number:
JP2005352121A
Publication Date:
January 25, 2012
Filing Date:
December 06, 2005
Export Citation:
Assignee:
ET Co., Ltd.
International Classes:
H05H1/24; H05H1/46
Domestic Patent References:
| JP7122396A | ||||
| JP2006516806A | ||||
| JP2005293955A | ||||
| JP2002093597A | ||||
| JP62044578A | ||||
| JP2003523116A | ||||
| JP2003086581A | ||||
| JP2004152876A | ||||
| JP2003509832A | ||||
| JP11260593A | ||||
| JP9232099A |
Foreign References:
| US20040182834 |
Attorney, Agent or Firm:
Toshi Inoguchi