To prevent temperature change of a projection optical system which is to be caused by heat from a heat source and stabilize quality, by installing temperature control units in at least one out of mirror tube parts of the projection optical system, a mounting connection part retaining the mirror tube parts, and a retaining table which retains the projection optical system via the mounting connection part.

This constitution is provided with a projection optical system PL which has mirror tube parts 26a, 26b and a mounting connection part 2 retaining the mirror tube parts 26a, 26b, and a retaining table 4 which has a part to be mounted and connected and retains the projection optical system PL by connecting the mounting connection part 2 with the part to be mounted and connected. Temperature control units 7, 9, 10, 14, 21 are installed in at least one out of the mirror tube parts 26a, 26b, the mounting connection part 2 and the retaining table 4. Heat generated from a heat source such as an exposure light source LS, a light source for alignment and a power source for other electric circuit is absorbed with the temperature control units 7, 9, 10, 14, 21, and thermal conduction to the projection optical system PL through the mounting connection part 2 and the mirror tube parts 26a, 26b is prevented.