Title:
PROJECTION ALIGNER AND METHOD FOR MANUFACTURING DEVICE
Document Type and Number:
Japanese Patent JP3619142
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To obtain a projection aligner, capable of accurately projecting the pattern of a reticle and a method for manufacturing a device using the same.
SOLUTION: The projection aligner projects the pattern of the reticle illuminated by a laser beam, from a continuously oscilled excimer laser on a base plate by a projection optical system. The optical system has a lens system, made of a substantially single vitreous material. The aligner comprises a wavelength stabilizing means for maintaining the oscillated wavelength of the laser at a constant.
Inventors:
Masakatsu Ota
Naoto Sano
Naoto Sano
Application Number:
JP2000344475A
Publication Date:
February 09, 2005
Filing Date:
November 10, 2000
Export Citation:
Assignee:
Canon Inc
International Classes:
G02B13/18; G02B13/22; G02B13/24; G03F7/20; G03F7/22; H01L21/027; H01S3/00; H01S3/139; (IPC1-7): H01L21/027; G02B13/18; G02B13/22; G02B13/24; G03F7/20; G03F7/22; H01S3/00; H01S3/139
Domestic Patent References:
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Attorney, Agent or Firm:
Yukio Takanashi
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