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Title:
PROJECTION ALIGNER AND METHOD FOR MANUFACTURING DEVICE
Document Type and Number:
Japanese Patent JP3619142
Kind Code:
B2
Abstract:

PROBLEM TO BE SOLVED: To obtain a projection aligner, capable of accurately projecting the pattern of a reticle and a method for manufacturing a device using the same.
SOLUTION: The projection aligner projects the pattern of the reticle illuminated by a laser beam, from a continuously oscilled excimer laser on a base plate by a projection optical system. The optical system has a lens system, made of a substantially single vitreous material. The aligner comprises a wavelength stabilizing means for maintaining the oscillated wavelength of the laser at a constant.


Inventors:
Masakatsu Ota
Naoto Sano
Application Number:
JP2000000344475
Publication Date:
February 09, 2005
Filing Date:
November 10, 2000
Export Citation:
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Assignee:
Canon Inc
International Classes:
G02B13/18; G02B13/22; G02B13/24; G03F7/20; G03F7/22; H01L21/027; H01S3/00; H01S3/139; (IPC1-7): H01L21/027; G02B13/18; G02B13/22; G02B13/24; G03F7/20; G03F7/22; H01S3/00; H01S3/139
Domestic Patent References:
JP2000235146A
JP2000195772A
JP11354862A
JP10270325A
JP10163553A
JP10163547A
JP9214023A
JP8181064A
JP7220988A
JP7142385A
JP7128590A
JP7058393A
JP5167148A
JP5034593A
JP1309323A
Attorney, Agent or Firm:
Takanashi Yukio