Title:
PROJECTION EXPOSING APPARATUS
Document Type and Number:
Japanese Patent JPS61251030
Kind Code:
A
Abstract:
PURPOSE:To prevent the printing precision from deteriorating by a method wherein any changeable attitude of a carriage due to shifting of the center of gravity of carriage is corrected to eliminate any deflection of printing range of a pattern. CONSTITUTION:When the center of gravity of a substrate stage mounted on a carriage 9 is shifted by movement etc. of the substrate stage including the carriage 9 by DELTAtheta, the relative positions with projection system of carriage 9 are as represented by solid lines in figure. At this time, the gap between an LAB7 and a guide rail 8 is detected first of all. Any jetting air out of LAB7 is controlled by a controller of microprocessor (CPU) etc. This CPU controls the air pressure jetted from each part of LAB7 so that e.g. the gaps detected by each sensor 10 may be equalized by corresponding to gaps detected by the gap sensor 10 to correct the changeable attitude of carriage 9. When the carriage 9 is canned as it is corrected, a pattern can be exposed without any deflection of printing range.
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Inventors:
ISOHATA JUNJI
MATSUSHITA KOICHI
YAMAMOTO SEKINORI
MIYAZAKI MAKOTO
OZAWA KUNITAKA
YOSHINARI HIDEKI
MATSUSHITA KOICHI
YAMAMOTO SEKINORI
MIYAZAKI MAKOTO
OZAWA KUNITAKA
YOSHINARI HIDEKI
Application Number:
JP9089885A
Publication Date:
November 08, 1986
Filing Date:
April 30, 1985
Export Citation:
Assignee:
CANON KK
International Classes:
H01L21/30; G03F7/20; G03F9/00; H01L21/027; H01L21/67; (IPC1-7): G03F9/00; H01L21/68
Attorney, Agent or Firm:
Tatsuo Ito