PROJECTION LENS AND METHOD OF MANUFACTURING PART HAVING VERY FINE STRUCTURE

Title:

PROJECTION LENS AND METHOD OF MANUFACTURING PART HAVING VERY FINE STRUCTURE

Document Type and Number:

Japanese Patent JP2002244036

Kind Code:

A

Abstract:

To provide a lithographic projection lens having a first lens group consisting of only the lens of positive refracting power.

The projection lens possesses the first lens group (G1) having positive refracting power, a second lens group (G2) having negative refracting power, and at least one additional lens group in which a diaphragm is arranged and which has positive refracting power. The first lens group (G1) consists of only lenses having positive refracting power. The number of the lenses (L101 to L103 and L201 to L202) having the positive refracting power of the first lens group (G1) is made smaller than that of the lenses (L116 to L119 and L215 to L217) of the other lens group (G5) arranged in front of the diaphragm and having the positive refracting power.

Inventors:

SCHUSTER KARL-HEINZ (DE)
EPPLE ALEXANDER (DE)

Application Number:

JP2001392742A

Publication Date:

August 28, 2002

Filing Date:

December 25, 2001

Export Citation:

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Assignee:

ZEISS CARL FA

International Classes:

G02B9/14; G02B13/14; G02B13/18; G02B13/22; G02B13/24; G03F7/20; H01L21/027; (IPC1-7): G02B13/24; G02B13/18; G02B13/22; G03F7/20; H01L21/027

Attorney, Agent or Firm:

Toshio Yano (4 outside)

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