Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
PROJECTION OBJECTIVE WITH INCIDENT PUPIL HAVING NEGATIVE BACKGROUND FOCUS, AND PROJECTION EXPOSURE DEVICE
Document Type and Number:
Japanese Patent JP2013065051
Kind Code:
A
Abstract:

To provide a projection objective which secures a space sufficient for mounting an optical element particularly in the front portion of an objective.

A projection objective includes: object planes (20, 100, 300, 2103) by which object visual fields are formed; an incident pupil (VE); a mirror image forming incident pupil (RE) within a mirror image forming incident pupil plane (103) obtained by forming the incident pupil (VE) into a mirror image within the object planes; image planes (21, 102, 302, 2102); an optical axis (HA); and at least a first mirror (S1) and a second mirror (S2). A background focus of the incident pupil of the projection objective is negative, principal rays (CR, CRP) which are generated from the central points of the object visual fields and traverse the objective from the object planes to the image planes intersect with the optical axis (HA) at least at one cross point (CROSS), and geometric positions of all cross points (CROSS, CROSS1, CROSS2) are present between the image planes (21, 102, 302, 2102) and the mirror image forming incident pupil plane (103).


Inventors:
DR HANS-JUERGEN MANN
DR WOLFGANG SINGER
Application Number:
JP2012285891A
Publication Date:
April 11, 2013
Filing Date:
December 27, 2012
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
ZEISS CARL SMT GMBH
International Classes:
G02B17/08; G02B13/14; G02B13/18; G02B19/00
Domestic Patent References:
JP2005294087A2005-10-20
JP2005294608A2005-10-20
JP2006253487A2006-09-21
JP2006351586A2006-12-28
JP2002015979A2002-01-18
JP2002509653A2002-03-26
Foreign References:
WO2005083759A12005-09-09
Attorney, Agent or Firm:
Sadao Kumakura
Fumiaki Otsuka
Takaki Nishijima
Hiroyuki Suda
Hiroshi Uesugi