Title:
投影光学系、並びに露光方法及び装置
Document Type and Number:
Japanese Patent JP5505685
Kind Code:
B2
Inventors:
Yasuhiro Hidaka
Application Number:
JP2009018093A
Publication Date:
May 28, 2014
Filing Date:
January 29, 2009
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
H01L21/027; G02B13/24; G03F7/20
Domestic Patent References:
| JP2007235041A | ||||
| JP7297110A | ||||
| JP2004200430A | ||||
| JP9327925A |
Foreign References:
| WO2008007632A1 |
Attorney, Agent or Firm:
Satoshi Omori