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Title:
PROJECTION TYPE OXIDE FILM STRUCTURE
Document Type and Number:
Japanese Patent JP2005339883
Kind Code:
A
Abstract:

To provide a projection type oxide film structure having a uniform shape by controlling the structure of a porous metal oxide film in a regular three-dimensional shape for example.

The projection type oxide film structure is formed by standing many porous columnar bodies 2 made of a metal oxide such as titanium oxide on a substrate 1 such as glass plate. The projection type oxide film structure is manufactured in such a way that a metal oxide precursor such as a titanium alkoxide solution is filled in micropores of an anodic oxide film obtained by anodic treatment of aluminum or the like, the anodic oxide film is laminated on the substrate so that the micropores are faced to the substrate, they are heated and baked, and the anodic oxide film is removed.


Inventors:
MASUYAMA NAOTO
HIWATARI KENICHI
HAYAMA HIDEKAZU
ISHIKAWA YUICHI
SON HITONORI
IKEDA TERUMI
Application Number:
JP2004154765A
Publication Date:
December 08, 2005
Filing Date:
May 25, 2004
Export Citation:
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Assignee:
ELECTRIC POWER DEV CO
International Classes:
H01L31/04; H01M14/00; (IPC1-7): H01M14/00; H01L31/04
Domestic Patent References:
JP2002353432A2002-12-06
JP2004074609A2004-03-11
JP2002170557A2002-06-14
Attorney, Agent or Firm:
Masatake Shiga
Tadashi Takahashi
Takashi Watanabe
Masakazu Aoyama
Yasuhiko Murayama