Title:
PROJECTOR UNIT AND ILLUMINATOR DEVICE FOR INSPECTION OF IMAGING DEVICE PROVIDED WITH THE SAME
Document Type and Number:
Japanese Patent JP2006138644
Kind Code:
A
Abstract:
To provide a projector unit and an illuminator device projecting an inspection pattern on the light reception surface of an imaging device without using a projection lens.
The projector unit 30 is constituted such that the pin hole plate 32 provided with a pin hole 32a for focusing the optical image of the color pattern chart 34 is oppositely arranged on the light reception surface 5 of the imaging device with a prescribed distance to the light dispersion plate 31 provided with the color pattern chart 34.
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Inventors:
IKO CHIKAYA
Application Number:
JP2004326027A
Publication Date:
June 01, 2006
Filing Date:
November 10, 2004
Export Citation:
Assignee:
NIKON CORP
International Classes:
G01M11/00; G02B19/00; G02F1/13
Domestic Patent References:
| JP2003156406A | 2003-05-30 | |||
| JP2004172595A | 2004-06-17 | |||
| JP2002314054A | 2002-10-25 | |||
| JPH07140046A | 1995-06-02 | |||
| JP2003307800A | 2003-10-31 |
Attorney, Agent or Firm:
Osamu Kiuchi