Title:
PROPORTIONAL VALVE AND SERVO VALVE WITH STATIC PRESSURE BEARING, AND METHOD OF FORMING SURFACE- DRAWING FOR STATIC PRESSURE BEARING
Document Type and Number:
Japanese Patent JP2004270870
Kind Code:
A
Abstract:
To provide a proportional valve and a servo valve with a static pressure bearing mechanism which can perform highly precise position control, and a method of forming a static pressure bearing.
The static pressure bearings are provided on lands 18a, 18c of a spool 18 which is movable within a sleeve 16. The static pressure bearings include surface-drawing 34, 40 formed on the outer peripheral surfaces of the respective lands 18a, 18c. Gas supply pressure is introduced from a supply port PS to the surface-drawing 34, 40.
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Inventors:
SASAKI KATSUMI
Application Number:
JP2003064833A
Publication Date:
September 30, 2004
Filing Date:
March 11, 2003
Export Citation:
Assignee:
PSC KK
International Classes:
F15B9/03; F16C32/06; F16K31/06; (IPC1-7): F16K31/06; F15B9/03; F16C32/06
Attorney, Agent or Firm:
Kenji Yoshida
Jun Ishida
Jun Ishida