Title:
PROTECTING METHOD OF VACUUM APPARATUS
Document Type and Number:
Japanese Patent JPS5425511
Kind Code:
A
Abstract:
PURPOSE: To protect a vacuum apparatus constituted of a plurality of vacuum instruments which are driven under the state of the interior in vacuum, from the invasion of the outside air in rupture.
Inventors:
ISHIKURA AKIRA
Application Number:
JP9044877A
Publication Date:
February 26, 1979
Filing Date:
July 29, 1977
Export Citation:
Assignee:
HITACHI LTD
International Classes:
B01D59/20; F04B37/16; (IPC1-7): F04B37/16