PURPOSE: To prevent a thin-film chamber from being broken, by providing a door opening/closing sensor in the thin-film chamber in a low-pressure chamber, and an exhaust device for changing the gas pressure in the low-pressure chamber in response to a signal from the sensor indicating that a door is open.
CONSTITUTION: The condition where a door 6 or a door 10 is open can be detected by a sensor 7 or 11, and a blower 3 is operated on a control output from a controlling part 8 which is supplied with detection signals from the sensors 7, 11. Therefore, the blower 3 is operated only when either one of the doors 6, 10 is open, so that a thin-film chamber 2 is not broken at the time of changing the gas pressure in a low-pressure test chamber 1 by opening a control valve 5 and operating the blower 3. At the time of discharging air or gases in the thin-film chamber 2 to the exterior, a control valve 15 is opened, a blower 12 is operated, and then the doors 10, 6 are opened to exhaust the interior of the thin-film chamber 2.
SUZUKI NOBUO
KOJIMA YOSHINORI
KATOU KAZUNAMI
MITSUBISHI MOTORS CORP
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