Title:
保護膜形成用フィルム及び保護膜形成用複合シート
Document Type and Number:
Japanese Patent JP7290771
Kind Code:
B2
Abstract:
The present invention relates to an energy ray-curable film for forming a protective film. The surface roughness (Ra) of at least one surface (α) of the film for forming the protective film is at least 0.038 µm. The surface roughness (Ra) of said surface (α) is preferably not more than 2.0 µm.
Inventors:
Kobashi Rikiya
Yoichi Inao
Yoichi Inao
Application Number:
JP2022061944A
Publication Date:
June 13, 2023
Filing Date:
April 01, 2022
Export Citation:
Assignee:
Lintec Corporation
International Classes:
H01L21/301; B32B3/30; B32B7/06; B32B27/16; C09J7/38; C09J201/00; H01L23/00
Domestic Patent References:
| JP201056328A | ||||
| JP201532644A | ||||
| JP2015160934A |
Attorney, Agent or Firm:
Kazuzumi Nishizawa
Mitsunaga Igarashi
Hiroyuki Kato
Mitsunaga Igarashi
Hiroyuki Kato