PURPOSE: To obtain a protective film for a magneto-resistance element which has an excellent protective characteristic to the magneto-resistance element and is easily produceable by using a protective film consisting of a compd. having the compsn. SiOxBy (x=0.05W1.0 and y is value satisfying x/y=0.01W1.0) as said film.
CONSTITUTION: An NiFe (83-17) alloy layer 11 having the large magneto- resistance effect is deposited on the surface of a glass or glaze substrate 10 to form the magneto-resistance element. The compd. of BiOxBy is formed by chemical vapor deposition on the surface of the alloy layer 11 to form a protec tive layer 12. The production of the protective film for the magneto-resistance element which has the excellent protective characteristic for the magneto- resistance element and is easily produceable is thus made possible.
OTAKE HITOSHI
YOKOBORI WATARU
ARAI MICHIO
Next Patent: PROTECTIVE FILM FOR MAGNETO-RESISTANCE SENSOR