Title:
PROTECTIVE MEMBER PROCESSING METHOD
Document Type and Number:
Japanese Patent JP2019062147
Kind Code:
A
Abstract:
To provide a new protective member processing method capable of properly processing a resin protective member.SOLUTION: A protective member processing method for processing a protective member stuck to a wafer using a grinding device including a chuck table having a holding surface for holding the wafer and a grinding unit for rotating a grinding wheel including a plurality of annularly arranged grinding stones includes a protective member sticking step, a groove forming step, and a protective member processing step. The protective member sticking step sticks an adhesive material layer side of a protective member including a base material formed of a material containing a resin and an adhesive material layer provided on one surface of the base material to a surface of the wafer. The groove forming step forms a plurality of grooves having a depth not reaching the adhesive material layer on the other surface side of the base material. The protective member processing step processes the protective member so that the thickness of the base material becomes thin by holding a rear surface side of the wafer on the holding surface and bringing a grinding stone into contact with the other surface side of the base material of the protective member by rotating the chuck table and the grinding wheel while supplying a liquid to the protective member.SELECTED DRAWING: Figure 7
Inventors:
KOIKE KAZUHIRO
OMOMOTO MASABUMI
NAGAI SHUSUKE
OMOMOTO MASABUMI
NAGAI SHUSUKE
Application Number:
JP2017187618A
Publication Date:
April 18, 2019
Filing Date:
September 28, 2017
Export Citation:
Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
H01L21/304; B23K26/364; B24B7/04; B24B7/30; B24B27/06; B24B41/06; B24B55/02
Domestic Patent References:
| JP2016092343A | 2016-05-23 | |||
| JP2007136636A | 2007-06-07 | |||
| JP2009141176A | 2009-06-25 | |||
| JP2013098290A | 2013-05-20 | |||
| JP2012049259A | 2012-03-08 | |||
| JP2011077094A | 2011-04-14 | |||
| JP2014192464A | 2014-10-06 |
Attorney, Agent or Firm:
Akira Matsumoto
Tomohiro Okamoto
Kasahara Takahiro
Tomohiro Okamoto
Kasahara Takahiro