To provide a method of forming uniform discharge plasma by applying pulse power between a spiral lead wire wound on an insulator and a conductor surrounding it and capable of being used for waste gas treatment with high efficiency, ozone formation with high efficiency, ultraviolet rays sources with high efficiency or the like.

A lead wire 2 is spirally wound on an insulator 1, and pulse power is applied between the lead wire 2 and an external conductor 3 surrounding it by a pulse power source 4 to form uniform discharge plasma. In this discharge plasma, waste gas, chemical materials, oxygen, air, or gaseous halogen is caused to flow to perform waste gas treatment, chemical material treatment, ozone formation, or ultraviolet rays generation with high efficiency.