To reduce diameter of a flexible wire without so increasing weight of a moving table, when a one-shaft eccentric screw pump mounted to the moving table is driven via the flexible wire.
A pump body 3 of the one-shaft eccentric screw pump 2 is mounted to a follow plate 11, and the one-shaft eccentric screw pump 2 is driven via the flexible wire 42. An electric motor 41 is fixed to a fixed position, and a reduction gear 7 is directly connected to a rotor 6 of the one-shaft eccentric screw pump 2. A rotation force of the electric motor 41 is transmitted to the reduction gear 7 via the flexible wire 42. Only the reduction gear 7 is lifted up or down together with the one-shaft eccentric screw pump 2. A lubricant is applied to an inner wire 42a of the flexible wire 42.
Shinichi Nakajima