Title:
PUMP DEVICE
Document Type and Number:
Japanese Patent JP2008232029
Kind Code:
A
Abstract:
To provide a pump device capable of reducing the vibration transmitted to a bellows by a simple and adjustable structure.
A vibration control damper 350 is composed of a rubber member 306 for damping vibration and the bellows 302 for maintaining a boundary between the atmosphere and vacuum. Elastic materials 321a, 321b are buried into a part of a groove 302a of the bellows 302. The rubber member 306 is wound around the bellows 302 and then is fastened by a band 323 for fixation, and a clearance 324 is formed between the bellows 302 and the rubber member 306. The bellows 302 are not greatly contracted even when a turbo-molecular pump main body 100 is evacuated owing to the existence of the rubber member 306.
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Inventors:
FUKAMI HIDEO
SAKAGUCHI YUKO
ENOSAWA HIDEKI
SAKAGUCHI YUKO
ENOSAWA HIDEKI
Application Number:
JP2007073086A
Publication Date:
October 02, 2008
Filing Date:
March 20, 2007
Export Citation:
Assignee:
EDWARDS KK
International Classes:
F04B37/16; F04D19/04
Attorney, Agent or Firm:
Masatoshi Shiina