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Title:
PUMP DEVICE
Document Type and Number:
Japanese Patent JP2015072008
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a pump device capable of stably keeping flow characteristics of a pump device.SOLUTION: A pump device of one embodiment, has a body, a diaphragm, a supporting portion and a movable portion. The body has a pump chamber capable of sucking and discharging a fluid. The diaphragm has a first face facing the pump chamber, and a second face at a side opposite to the first face, and a peripheral edge portion having a prescribed thickness along uniaxial direction is supported by the body, and formed into the circular shape. The supporting portion has a first circular connecting face connected to the first face of the diaphragm. The movable portion is connected to the second face of the diaphragm, and opposed to the first connection face in the uniaxial direction at a distance smaller than the prescribed thickness, has a second circular connection face larger than the first connection face, and is uniaxially reciprocated in the body.

Inventors:
MIYATA KAZUYA
YAMANAKA AKIHIRO
ITOYAMA RYUJI
Application Number:
JP2014182599A
Publication Date:
April 16, 2015
Filing Date:
September 08, 2014
Export Citation:
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Assignee:
ULVAC KIKO INC
International Classes:
F04B45/04
Domestic Patent References:
JPH03206378A1991-09-09
JPS6049353U1985-04-06
JP2000170660A2000-06-20
Foreign References:
WO2012120859A12012-09-13
Attorney, Agent or Firm:
大森 純一
折居 章