Title:
ポンプ装置
Document Type and Number:
Japanese Patent JP5878625
Kind Code:
B2
Abstract:
[Object] To provide a pump device capable of achieving a further reduction in power consumption. [Solving Means] A pump device (1) according to an embodiment of the present invention includes a drive motor (M), a first pump unit for evacuation (11) including a first pump chamber and a first piston (21v), and a second pump unit for pressurization (12) including a second pump chamber and a second piston (21c). The second piston (21c) has a phase advanced with a rotational phase difference (Õ) of more than 0° and less than 80° with respect to the first piston (21v).
Inventors:
Taisuke Osaka
Yusaku Tanabe
Motoyasu Nagano
Ryuji Itoyama
Yusaku Tanabe
Motoyasu Nagano
Ryuji Itoyama
Application Number:
JP2014507375A
Publication Date:
March 08, 2016
Filing Date:
March 07, 2013
Export Citation:
Assignee:
ULVAC Kiko Co., Ltd.
International Classes:
F04B41/06
Domestic Patent References:
| JP7310651A | ||||
| JP2008190517A |
Foreign References:
| US8128382 |
Attorney, Agent or Firm:
Junichi Omori
Ori Akira
Ori Akira