Title:
ポンプおよび流体制御装置
Document Type and Number:
Japanese Patent JP6904436
Kind Code:
B2
Abstract:
A pump includes a first pump chamber defined by a first plate-shaped body and a second plate-shaped body, a second pump chamber defined by the first plate-shaped body and a third plate-shaped body, and a driving body. The driving body causes a pressure fluctuation, by causing the first plate-shaped body to undergo bending vibration, in both the first pump chamber and the second pump chamber. The first plate-shaped body is provided with a plurality of first hole portions that does not overlap with an axis orthogonal to the central portion of the first plate-shaped body, and a check valve is attached to each of the plurality of first hole portions. The second plate-shaped body and the third plate-shaped body are respectively provided with second hole portions and third hole portions, and no check valve is attached to the second hole portions and the third hole portions.
Inventors:
Shin Tanaka
Application Number:
JP2019564313A
Publication Date:
July 14, 2021
Filing Date:
November 09, 2018
Export Citation:
Assignee:
MURATA MANUFACTURING CO.,LTD.
International Classes:
F04B45/04; F04B45/047
Domestic Patent References:
| JP2008537057A |
Foreign References:
| WO2016013390A1 |
Attorney, Agent or Firm:
Fukami patent office