Title:
ポンプおよびロボットハンド
Document Type and Number:
Japanese Patent JP6747183
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a pump and a robot hand that can be downsized.SOLUTION: A pump comprises: a wall part; a first diaphragm connected to the wall part to constitute an internal space, and including a first diaphragm part; and a first piezoelectric element arranged on the side of the internal space with respect to the first diaphragm part, and deformed by receiving electric power. In addition, the pump comprises a protective layer provided on the side of the internal space with respect to the first diaphragm part, and covering at least a part of the first piezoelectric element. The internal space is preferably constituted between the protective layer and the wall part.SELECTED DRAWING: Figure 1
Inventors:
Osamu Miyazawa
Application Number:
JP2016168962A
Publication Date:
August 26, 2020
Filing Date:
August 31, 2016
Export Citation:
Assignee:
Seiko Epson Corporation
International Classes:
F04B43/04; B25J15/08; F04B43/02; F04B45/047
Domestic Patent References:
JP1134786U | ||||
JP2010242501A | ||||
JP63176679A | ||||
JP10299659A | ||||
JP2015145056A | ||||
JP2014200874A |
Foreign References:
US20120301333 |
Attorney, Agent or Firm:
Kazuaki Watanabe
Mitsuhiro Isobe
Satoshi Nakai
Hiroki Matsuoka
Mitsuhiro Isobe
Satoshi Nakai
Hiroki Matsuoka