PUMP FOR SEMICONDUCTOR EQUIPMENT

Japanese Patent JP3310566

B2

PROBLEM TO BE SOLVED: To suppress occurrence of pulsation so as to continuously and smoothly circulate and transport fluid, and besides, reduce to a large extent an arranging space by simplifying the structure of a piping and miniaturizing the whole of a pump.
SOLUTION: A reciprocating pump part 4 is formed by arranging mutually opposed bellows 7, 18 in casings 6, 17 which are fixed and provided adjacently to each other in both side parts of a partitioning wall 1 equipped with a liquid inflow passage 2 and an outflow passage 3, and arranging check valves 16a, 16b by which one of bellows 7 can be driven, extended and shrunk through an air cylinder part 14, and also which is operated to be alternately opened and closed so that liquid is sucked to and delivered from a pump operating chamber 9a formed in this bellows 7. Then, a liquid chamber 20a which can temporarily reverse liquid delivered from the pump part 4 and an air chamber 20b which is formed separately from this liquid chamber 20a and in which pulsation suppressing gas is enclosed, are formed on the other bellows 17 side, thereby a pulsation suppressing part 5 can be formed, by which pulsation by discharge pressure of liquid delivered from the pump operating chamber 9a of the pump part 4 by the capacity change of the liquid chamber 20a accompanied by the extending, shrinking deformation of the bellows 17, is absorbed.

Kiyoshi Nishio
Ryo Imanishi
Mutsumi Fujii
Yoji Minato

JP293497A

August 05, 2002

January 10, 1997

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Nippon Pillar Industry Co., Ltd.

F04B11/00; F04B43/06; F04B43/08; (IPC1-7): F04B11/00; F04B43/06; F04B43/08

JP8159016A
JP5240161A
JP8121342A
JP4818803A
JP61275589A
JP727043A
JP647675U
JP2119985U

Koichi Suzue (1 person outside)

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