Title:
ポンプシステム
Document Type and Number:
Japanese Patent JP5770458
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a pump device capable of limiting discharge of fluid during a shutdown.SOLUTION: The pump device 3 includes a casing 10, a movable member 30, a suction valve 41, a discharge valve 42 and a valve mechanism 50. The casing 10 includes a pump chamber 100 communicating with a suction port 101 and a discharge port 102. The movable member 30 is capable of moving inside the casing 10 to perform suction and discharge of fluid into and from the pump chamber 100 alternately. The discharge valve 42 is mounted between the pump chamber 100 and the discharge port 102 to allow the flow of the fluid having a first pressure or higher from the pump chamber 100 to the discharge port 42. The valve mechanism 50 is mounted to the casing 10 to limit the flow of the fluid having a pressure higher than the first pressure and not higher than a second pressure from the suction port 101 to the discharge port 102.
Inventors:
Yuji Nonomura
Tsuneo Osaka
Ryuji Itoyama
Tsuneo Osaka
Ryuji Itoyama
Application Number:
JP2010267547A
Publication Date:
August 26, 2015
Filing Date:
November 30, 2010
Export Citation:
Assignee:
ULVAC Kiko Co., Ltd.
International Classes:
F04B53/10; F04B45/04
Domestic Patent References:
| JP2000274374A |
Attorney, Agent or Firm:
Junichi Omori
Ori Akira
Ori Akira