To provide a pure water supply system capable of easily calculating the charge for a consumption of pure water based on the charge rate of pure water satisfying a required water quality standard.
A supply distribution pipe 11a for supplying pure water from a pure water storage tank 2 to a pure water service site 6a is provided with a supply water metering means such as a flow meter F1. A return water flow metering means such as a flow meter F4 is provided on a return distribution pipe 12a for returning unused pure water not consumed at the pure water service site 6a to the pure water storage tank 2 in water treatment equipment such as a reverse osmosis membrane device 5 and a desalting device 7 constituting a water treatment unit 10 included in a flow meter. A control system 20 is provided with a charge calculating means for calculating the amount of actually consumed pure water on the basis of the difference between the amount of supplied water metered by the supply water metering means and the amount of returned water metered by the return water flow metering means and calculating the amount of the actually used pure water. By providing a water quality measuring means 5 in the supply distribution pipe 11a, the charge for consumption of pure water of an acceptable water quality excluding pure water not satisfying the required water quality can be calculated.
FUKUE SUSUMU
JPH05329470A | 1993-12-14 |
JPN6011002532; 太田嘉治: '膜分離技術の水処理への応用 実施例IV 東北大学電気通信研究所の超LSI用超純水システム' 空気調和・衛生工学 第62巻 第1号, 198801, 35-39頁
Masataka Ota