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Patent Searching and Data


Title:
PURGE SYSTEM AND PURGE METHOD INSIDE PORTABLE AIRTIGHT CONTAINER
Document Type and Number:
Japanese Patent JP2005101261
Kind Code:
A
Abstract:

To reduce a fine pressure variation at a short interval caused when a portable airtight container is purged.

A gas supply system in a purge system and a flow rate adjuster of a gas with respect to a gas exhaust system are disposed, respectively. The flow rate of the gas exhausted from the gas exhaust system is controlled, and simultaneously, a pressure in the portable airtight container in purging is measured, and the effect is fed back to control the flow rate of the supply gas.


Inventors:
Miyajima, Toshihiko
Kagaya, Takeshi
Suzuki, Hitoshi
Sasaki, Mutsuo
Application Number:
JP2003000332936
Publication Date:
April 14, 2005
Filing Date:
September 25, 2003
Export Citation:
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Assignee:
TDK CORP
International Classes:
H01L21/677; H01L21/00; H01L21/673; (IPC1-7): H01L21/68
Attorney, Agent or Firm:
岡部 正夫
加藤 伸晃
産形 和央
臼井 伸一
藤野 育男
越智 隆夫
本宮 照久
高梨 憲通
朝日 伸光
高橋 誠一郎
吉澤 弘司
松井 孝夫