PURIFICATION OF CVD RAW MATERIAL SUBSTANCE - NIPPON TELEGRAPH & TELEPHONE

Title:

PURIFICATION OF CVD RAW MATERIAL SUBSTANCE

Document Type and Number:

Japanese Patent JPH04235994

Kind Code:

A

Abstract:

PURPOSE: To obtain a purification method capable of obtaining an organic titanium compound RXTi(N3)4-X in high purity and yield in synthesis of the above-mentioned compound used for formation of titanium based thin film by a CVD method.

CONSTITUTION: The above-mentioned purpose is attained by carrying out purification of the above-mentioned synthesized product by recrystallization using a mixed solvent containing a polar solvent such as toluene or non-polar solvent such as heptane or purifying the above-mentioned product by sublimation.

More Like This:

JP3385243	[Title of Invention] Method for Producing Titanium Oxide Sol
JP3902957	TITANIUM-INCLUDING ORGANIC PRECURSOR AND METHOD OF PRODUCING THE SAME

Inventors:

IKEDA KOICHI
MAEDA MASAHIKO
ARITA MUTSUNOBU
KISO KOICHI
IIDA REIKO
TAKAMATSU JUKICHI

Application Number:

JP216091A

Publication Date:

August 25, 1992

Filing Date:

January 11, 1991

Export Citation:

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Assignee:

NIPPON TELEGRAPH & TELEPHONE
TORI KEMIKARU KENKYUSHO KK

International Classes:

C07F7/28; C23C16/00; (IPC1-7): C07F7/28; C23C16/00

Attorney, Agent or Firm:

Junnosuke Nakamura

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