PURPOSE: To economically regenerate the title solvent required in semiconductor industries, etc., and to make the solvent reusable without problems of pollution, by extracting a used fluorocarbon solvent containing impurities liquid at room temperature with water, further adsorbing remaining impurities on an adsorbent and removing.
CONSTITUTION: A used fluorocarbon solvent liquid at normal temperature is sent from a washing tank 1 to a continuous extracting tank 3 by a pump 2 and blended with pure water 4 introduced at a fixed rate. The blended solution is fed to a separating tank 5, allowed to stand and separated into two layers. The separated two layers are extracted from a water layer 7 and a fluorocarbon 113 layer 8 so that position of the interfacial boundary 6 becomes constant. The water layer is sent to a treating device 9 such as combustion equipment and the fluorocarbon 113 layer is sent to the adsorbent filled column 10. The fluorocarbon having passed through the adsorbent filled column 10 is circulated to the washing tank. In the operation, the fluorocarbon 113 reduced in amount is supplied from a new fluorocarbon 113 feed path 11.
SUGANO KIYOMITSU
TORISU JUNICHI
