Title:
PURIFICATION AND RECOVERY OF TETRAALKYLAMMONIUM HYDROXIDE FROM WASTE DEVELOPER LIQUOR
Document Type and Number:
Japanese Patent JP3216998
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To industrially advantageously purify and recover a high-purity tetraalkylammonium hydroxide reusable in the photolithography process from a waste liquor containing a tetraalkylammonium hydroxide used as a positive- type resist developer.
SOLUTION: A waste liquor containing a tetraalkylammonium hydroxide is treated with activated carbon to adsorb the impurities in the waste liquor to the activated carbon and remove them. Alternatively, the waste liquor is neutralized to remove the resultant insolubilized deposits, and then treated with activated carbon to adsorb the impurities in the waste liquor to the activated carbon and remove them; the resultant waste liquor is subjected to electrodialysis in an electrolytic bath using a cation exchange membrane.
Inventors:
Koji Irie
Katsuji Yano
Yoshio Kinoshita
Koichi Wada
Norio Moriya
Katsuji Yano
Yoshio Kinoshita
Koichi Wada
Norio Moriya
Application Number:
JP22933296A
Publication Date:
October 09, 2001
Filing Date:
August 12, 1996
Export Citation:
Assignee:
SHOWA DENKO K.K.
International Classes:
G03F7/26; B01D61/44; C02F1/28; C02F1/469; C07C209/84; C07C211/63; (IPC1-7): C07C209/84; B01D61/44; C02F1/28; C02F1/469; C07C211/63
Domestic Patent References:
| JP517889A | ||||
| JP5106074A | ||||
| JP568980A | ||||
| JP6314759A |
Attorney, Agent or Firm:
Yukio Uchida