Title:
PYROELECTRIC ARRAY SENSOR
Document Type and Number:
Japanese Patent JPH0510817
Kind Code:
A
Abstract:
PURPOSE:To obtain a sensor of which the characteristics have little nonuniformity, by a method wherein a plurality of infrared ray sensing electrodes are disposed in a line at a prescribed interval on the surface of a base having a pyroelectric effect and counter electrodes being wider than the light-sensing electrodes are provided so that they are opposed to these electrodes. CONSTITUTION:A plurality of light-sensing electrodes 20 and electrode lead-out parts 24 are provided by a method of evaporation, sputtering or the like on the surface 11 of a pyroelectric body base constituted of PbTiO3 or the like and made to be a thin plate by cutting and grinding, for instance. Position alignment in fitting of a metal mask on the occasion is executed with the end face of the base used as a reference or by using a marker on the base. On the rear 12 of the pyroelectric body base, subsequently, counter electrodes 30 are provided in the same way at positions at which they are opposed to the light-sensing electrodes 20 respectively, and lead-out parts 34 for the counter electrodes are formed. On the occasion, the sizes of the counter electrodes 30 are made larger than those of the electrodes 20. By this method, overlapping of the electrodes opposed to each other on the surface and the rear of the base is made easy and exact position alignment a usual manner is not needed.
Inventors:
YOSHIIKE NOBUYUKI
ARITA KOJI
KOBAYASHI SUSUMU
ARITA KOJI
KOBAYASHI SUSUMU
Application Number:
JP15298191A
Publication Date:
January 19, 1993
Filing Date:
June 25, 1991
Export Citation:
Assignee:
MATSUSHITA ELECTRIC IND CO LTD
International Classes:
G01J1/02; G01J5/02; G01J5/34; (IPC1-7): G01J1/02; G01J5/02
Attorney, Agent or Firm:
Akira Kobiji (2 outside)
Next Patent: JPH0510818