To provide a pyroelectric detector, a pyroelectric detection device and an electronic apparatus that enhance pyroelectric effect of a pyroelectric detection element in a pyroelectric material and can improve detection accuracy.
A pyroelectric detector 200A is constituted of a first electrode 234, a second electrode 236 and a pyroelectric material 232 disposed between the first and second electrodes 234 and 236 and has a pyroelectric detection element 220A including a capacitor 230 in which a polarization amount varies based on temperature. A supporting member 210 on which the pyroelectric detection element 220A is mounted includes a first surface 211A and a second surface 211B opposite to the first surface. In the supporting member 210, the second surface 211B is disposed so as to face a cavity portion 102 and the first surface 211A is brought into contact with the first electrode 234. Posts 104 support parts of the second surface 211B of the supporting member 210. The capacitor 230 includes an electromagnetic wave absorber for absorbing an electromagnetic wave. A wiring layer 224A and a second plug 228 disposed upstream from the electromagnetic wave absorber in an incident path of the electromagnetic wave are formed by an electromagnetic wave transmissivity structure that transmits the electromagnetic wave therethrough.
Osamu Suzawa
Kazuhiko Miyasaka
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