Title:
焦電型検出器、焦電型検出装置及び電子機器
Document Type and Number:
Japanese Patent JP5772052
Kind Code:
B2
Abstract:
A pyroelectric detector includes a substrate, a support member and a pyroelectric detection element, which includes a capacitor, first and second reducing gas barrier layers, an insulating layer, a plug and a second electrode wiring layer. The first reducing gas barrier layer covers at least a second electrode and a pyroelectric body of the capacitor, and has a first opening that overlaps the second electrode in plan view. The insulating layer covers at least the first reducing gas barrier layer, and has a second opening that overlaps the first opening in plan view. The plug is disposed in the first and second openings and connected to the second electrode. The second electrode wiring layer is formed on the insulating layer and connected to the plug. The second reducing gas barrier layer is formed on the insulating layer and the second electrode wiring layer and covers at least the plug.
Inventors:
Takashi Noda
Application Number:
JP2011036671A
Publication Date:
September 02, 2015
Filing Date:
February 23, 2011
Export Citation:
Assignee:
Seiko Epson Corporation
International Classes:
G01J1/02; H01L27/144; H01L27/146; H01L37/02; H04N5/33
Domestic Patent References:
| JP2002176149A | ||||
| JP8297053A | ||||
| JP6281503A | ||||
| JP2008135618A | ||||
| JP2000286473A | ||||
| JP2010262422A | ||||
| JP9288010A | ||||
| JP2007329393A | ||||
| JP2006049795A | ||||
| JP2006170895A |
Foreign References:
| US20070296008 | ||||
| US20030006439 | ||||
| US20090278231 |
Attorney, Agent or Firm:
Inoue Ichi
Takekoshi Noboru
Yasushi Kuroda
Takekoshi Noboru
Yasushi Kuroda
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