Title:
焦電型検出器、焦電型検出装置及び電子機器
Document Type and Number:
Japanese Patent JP5879695
Kind Code:
B2
Abstract:
A pyroelectric detector includes a substrate, a support member, a spacer member, and a pyroelectric detecting element. The spacer member supports the support member over the substrate with a cavity part being formed therebetween. The pyroelectric detecting element includes a first electrode mounted on the support member, a second electrode, and a pyroelectric body between the first and second electrodes. The support member includes an insulating layer, a first wiring layer disposed on a side of the second surface of the support member with respect to the insulating layer, and a first plug passing through the insulating layer at a position where the pyroelectric body and the first wiring layer overlap in plan view to connect the first wiring layer with the first electrode.
Inventors:
Takashi Noda
Application Number:
JP2011037960A
Publication Date:
March 08, 2016
Filing Date:
February 24, 2011
Export Citation:
Assignee:
Seiko Epson Corporation
International Classes:
G01J1/02; H01L37/02
Domestic Patent References:
| JP2002124708A | ||||
| JP8297053A | ||||
| JP2003092391A | ||||
| JP2001099705A | ||||
| JP10185681A | ||||
| JP8062035A | ||||
| JP2007287915A | ||||
| JP2006073830A | ||||
| JP7111318A | ||||
| JP2008071621A |
Attorney, Agent or Firm:
Masahiko Ueyanagi
Osamu Suzawa
Osamu Suzawa