Title:
焦電素子
Document Type and Number:
Japanese Patent JP5174995
Kind Code:
B2
Abstract:
A pyroelectric element 10 includes a pyroelectric substrate 20 being a substrate of lithium tantalate single crystal having an X-axis, a Y-axis, and a Z-axis as crystal axes; front-side electrodes 41 and 42 disposed on a front side of the pyroelectric substrate 20; and back-side electrodes 51 and 52 paired with the front-side electrodes 41 and 42, respectively. The pyroelectric substrate 20 is a Y-offcut plate obtained by cutting the lithium tantalate single crystal at an angle turned by a cut angle ¸ from the Y-axis toward the Z-axis about the X-axis that coincides with a direction along the electrode plane, and the cut angle ¸ is 30° to 60° or 120° to 150°. The pyroelectric substrate 20 is preferably 10 µ m or less in thickness, and is more preferably 5 µ m to 10 µ m in thickness.
Inventors:
Tomoyoshi Tai
Kenji Suzuki
Jungo Kondo
Kenji Suzuki
Jungo Kondo
Application Number:
JP2012540974A
Publication Date:
April 03, 2013
Filing Date:
October 20, 2011
Export Citation:
Assignee:
Nippon Insulator Co., Ltd.
International Classes:
H01L37/02; G01J1/02
Domestic Patent References:
| JPH11230826A | 1999-08-27 | |||
| JP2000164946A | 2000-06-16 |
Attorney, Agent or Firm:
Aitec International Patent Office