Title:
PYROELECTRIC INFRARED DETECTOR AND ITS MANUFACTURE
Document Type and Number:
Japanese Patent JPH0894436
Kind Code:
A
Abstract:
PURPOSE: To provide a pyroelectric infrared detector which is worked fine, which is low-cost and which can be miniaturized and to provide its manufacturing method.
CONSTITUTION: An opening part is formed in a substrate 38, a light-receiving electrode 35 is installed on it, a pyroelectric body 33 is installed, an organic insulating film 34 is formed on it, and an extraction electrode 32 is connected to the pyroelectric body 33 via a contact hole which has been made in the organic insulating film 34. The pyroelectric body 33 is smaller than the opening part in the substrate 38, and it is installed nearly in the center. Infrared rays are entered into the lightreceiving electrode 35 via the opening part in the substrate 38.
Inventors:
FUJII SATORU
TAKAYAMA RYOICHI
HAYASHI SHIGENORI
TOMOSAWA ATSUSHI
DEGUCHI TAKASHI
TAKAYAMA RYOICHI
HAYASHI SHIGENORI
TOMOSAWA ATSUSHI
DEGUCHI TAKASHI
Application Number:
JP22790994A
Publication Date:
April 12, 1996
Filing Date:
September 22, 1994
Export Citation:
Assignee:
MATSUSHITA ELECTRIC IND CO LTD
International Classes:
G01J1/02; G01J5/02; G01J5/34; H01L37/02; (IPC1-7): G01J1/02; G01J5/02; H01L37/02
Attorney, Agent or Firm:
Akira Kobiji (2 outside)
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