To provide a pyroelectric infrared sensor capable of deformation and high in sensitivity.
The flexible substrate 11 consists of polymeric material such as polyimide or polyethylene terephthalate, and the layer 13 which consists of vinylidene fluoride (VDF) oligomer is provided, and up and down side of the VDF oligomer layer 13, the flexible electrodes 12 and 14 formed by Al deposition membranes are provided. By the flexibility of these constitutional elements, the pyroelectric infrared sensor of this invention is provided with flexibility as a whole, and capable of deformation into desired shape. The substrate of polymeric material is lower heat capacity and lower heat conductivity than the conventional substrate of Si used for the conventional pyroelectric infrared sensor, therefore the sensitivity of the sensor can be improved.
COPYRIGHT: (C)2008,JPO&INPIT
| JPS63317735 | OPTICAL POWER METER |
| WO/2004/059267 | LIGHT-DISTRIBUTION IMAGING DEVICE AND IMAGING METHOD |
| JPS62125768 | IMAGE SENSOR HOLDING MEMBER |
KUWAJIMA SHUICHIRO
MATSUSHIGE KAZUMI
HORIUCHI YOSHITOSHI
MATSUMOTO YUJI
KOTANI TETSUHIRO
KO MEITEN
DAIKIN IND LTD
| JP2004037291A | 2004-02-05 | |||
| JPS54128685A | 1979-10-05 | |||
| JPH01296216A | 1989-11-29 | |||
| JPH0792025A | 1995-04-07 | |||
| JP2005136325A | 2005-05-26 | |||
| JPH08136342A | 1996-05-31 | |||
| JP2000019034A | 2000-01-21 | |||
| JPS61161868A | 1986-07-22 | |||
| JP2005183740A | 2005-07-07 |