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Patent Searching and Data


Title:
PYROELECTRIC INFRARED THIN FILM ELEMENT AND ITS MANUFACTURE
Document Type and Number:
Japanese Patent JPH08167741
Kind Code:
A
Abstract:

PURPOSE: To provide an inexpensive pyroelectric infrared thin film element which has high sensitivity and a high speed of response and a manufacturing method of the element.

CONSTITUTION: A pyroelectric infrared thin film element is formed by successively forming a Pt film 3 oriented in (100)-direction, a first pyroelectric thin film 4 precipitated on the film 3, a second pyroelectric thin film 5 which is deposited on the film 4 and has a rough surface to increase the infrared-ray absorptance, and a light receiving section 6 composed of an infrared-ray transmitting electrode on a substrate 2 and removing the part, which is larger than the section 6, of the substrate 2 immediately below the light receiving section 6. The Pt film 3 is used as a lower electrode.


Inventors:
TOMINAGA KOJI
MATSUMOTO KOICHI
Application Number:
JP33168994A
Publication Date:
June 25, 1996
Filing Date:
December 10, 1994
Export Citation:
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Assignee:
HORIBA LTD
International Classes:
G01J1/02; C23C14/08; G01J5/02; G01J5/34; H01L37/02; (IPC1-7): H01L37/02; C23C14/08; G01J1/02; G01J5/02
Attorney, Agent or Firm:
Hideo Fujimoto