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Title:
PYROELECTRIC PHOTODETECTOR, PYROELECTRIC PHOTODETECTION DEVICE, AND ELECTRONIC APPARATUS
Document Type and Number:
Japanese Patent JP2015135264
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a pyroelectric photodetector, a pyroelectric photodetection device, and an electronic apparatus in which heat capacity is reduced more than before, and excellent sensitivity and responsiveness are achieved.SOLUTION: A pyroelectric photodetector 110 has a plurality of heat detection parts 115 formed on a support part (membrane) 107, the heat detection parts 115 being a regular square in a plan view, a length L of one side of which is a length capable of resonating at a specific frequency. The heat detection parts 115 are a pyroelectric capacitor in which a pyroelectric substance is held between a pair of electrodes, functioning as a nondirectional parallel plate type antenna.

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Inventors:
NODA TAKASHI
Application Number:
JP2014006458A
Publication Date:
July 27, 2015
Filing Date:
January 17, 2014
Export Citation:
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Assignee:
SEIKO EPSON CORP
International Classes:
G01J1/02; G01J1/42; G01N21/35; H01L27/144; H01L27/146; H01L37/00
Attorney, Agent or Firm:
Masahiko Ueyanagi
Kazuaki Watanabe