Title:
PYROELECTRIC PHOTODETECTOR, PYROELECTRIC PHOTODETECTION DEVICE, AND ELECTRONIC APPARATUS
Document Type and Number:
Japanese Patent JP2015161642
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a pyroelectric photodetector equipped with a pyroelectric capacitor having pyroelectric characteristics such as high sensitivity and excellent polarization characteristics, and to provide a pyroelectric photodetection device or an electronic apparatus equipped with the pyroelectric photodetector.SOLUTION: A pyroelectric photodetector 110 includes: a substrate 101; a support body 111 arranged via a cavity 118 on the substrate 101; a pyroelectric capacitor 115 arranged on the support body 111; and a light absorption member 117. A pyroelectric body 113 held between a lower electrode 112 and an upper electrode 114 of the pyroelectric capacitor 115 is constituted of a ferroelectric substance of a PZTN system, which has a thickness of less than 1 μm.
Inventors:
NODA TAKASHI
Application Number:
JP2014038177A
Publication Date:
September 07, 2015
Filing Date:
February 28, 2014
Export Citation:
Assignee:
SEIKO EPSON CORP
International Classes:
G01J1/02; H01L21/316; H01L37/02
Attorney, Agent or Firm:
Masahiko Ueyanagi
Kazuaki Watanabe
Kazuaki Watanabe