Title:
焦電型光検出器、焦電型光検出装置及び電子機器
Document Type and Number:
Japanese Patent JP5218460
Kind Code:
B2
Abstract:
A pyroelectric detector (200) includes a pyroelectric detection element (220), a support member (210), a fixing part (100) and a first reducing gas barrier layer (140, 280). A first side of the support member faces a cavity (102) and the pyroelectric detection element is mounted and supported on a second side opposite from the first side. An opening part (102A) communicated with the cavity is formed on a periphery of the support member in plan view from the second side of the support member. The fixing part supports the support member. The first reducing gas barrier layer covers a first surface of the support member on the first side, a side surface (211C) of the support member facing the opening part, and a part of a second surface (220A) of the support member on the second side and the pyroelectric detection element exposed as viewed from the second side of the support member.
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Inventors:
Takashi Noda
Jun Takizawa
Jun Takizawa
Application Number:
JP2010072080A
Publication Date:
June 26, 2013
Filing Date:
March 26, 2010
Export Citation:
Assignee:
Seiko Epson Corporation
International Classes:
G01J1/02; H01L27/144; H01L37/02
Domestic Patent References:
| JP2008232896A | ||||
| JP2006005234A | ||||
| JP2004296929A | ||||
| JP9061238A | ||||
| JP6281503A |
Attorney, Agent or Firm:
Inoue Ichi
Takekoshi Noboru
Yasushi Kuroda
Takekoshi Noboru
Yasushi Kuroda