Title:
焦電型光検出器及び焦電型光検出装置並びに電子機器
Document Type and Number:
Japanese Patent JP5240373
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a pyroelectric photodetector having a structure allowing an incidence of light in a pyroelectric photodetection element while preventing easy intrusion of reducing gas.SOLUTION: A pyroelectric photodetector 200 includes: a pyroelectric photodetection element 200; a support member 210 mounted with the pyroelectric photodetection element; a fixing part 100 disposed with a cavity part 102 at a position facing the pyroelectric photodetection element and supporting the support member; an opening part 102A opened along the outline of the support member in plan view viewed from the side of the pyroelectric photodetection element and communicated with the cavity part; and first reducing gas barrier layers 140 and 280 that cover a first surface of the support member, a side face 211C of the support member facing the opening part, the pyroelectric photodetection element exposed in plan view, and the outer surface 220A of the support member.
Inventors:
Takashi Noda
Jun Takizawa
Jun Takizawa
Application Number:
JP2012013769A
Publication Date:
July 17, 2013
Filing Date:
January 26, 2012
Export Citation:
Assignee:
Seiko Epson Corporation
International Classes:
G01J1/02; H01L37/02
Domestic Patent References:
| JP2008262896A | ||||
| JP2006005234A | ||||
| JP2004296929A | ||||
| JP2006177712A | ||||
| JP7273306A | ||||
| JP2006244941A | ||||
| JP6281503A |
Attorney, Agent or Firm:
Inoue Ichi
Takekoshi Noboru
Yasushi Kuroda
Takekoshi Noboru
Yasushi Kuroda