Title:
PYROELECTRIC SENSOR ELEMENT AND DETECTOR USING THE SAME
Document Type and Number:
Japanese Patent JP2013004780
Kind Code:
A
Abstract:
To provide a pyroelectric sensor element that has high accuracy and high sensitivity by taking advantage of a niobium oxide-based polycrystalline formed into a thin film, and to provide a detector using the same.
A pyroelectric sensor element includes: a pyroelectric body layer 2 comprising a lead free alkali niobium oxide-based polycrystalline; a lower electrode 3 formed on a lower surface of the pyroelectric body layer 2; and an upper electrode 4 formed on an upper surface of the pyroelectric body layer 2.
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Inventors:
UNNO TSUNEHIRO
MIZUTANI TOMOYA
MIZUTANI TOMOYA
Application Number:
JP2011135113A
Publication Date:
January 07, 2013
Filing Date:
June 17, 2011
Export Citation:
Assignee:
HITACHI CABLE
International Classes:
H01L37/02
Domestic Patent References:
| JP2006291332A | 2006-10-26 | |||
| JPH08166287A | 1996-06-25 |
Attorney, Agent or Firm:
Nobuo Kinutani