Title:
画素間の寄生熱クロストークを低減したピロ電気センサ
Document Type and Number:
Japanese Patent JP2004506188
Kind Code:
A
Abstract:
Pyroelectric sensor has each pixel's secondary electrode made with no contact with other secondary electrodes. The pyroelectric sensor consists of a series of pixels (12A) with primary (14) and secondary (28) electrodes on opposite surfaces of a thin porous pyroelectric layer (20A) on a substrate (8A). The secondary electrode of each pixel has either no metallic contact with other secondary electrodes or a contact only via a metal track of relatively thin section. The pyrotechnic layer is applied by a sol-gel procedure with the aid of a soluble polymer in a base solution, and the substrate incorporates an intermediate layer (32) of an aerogel providing thermal insulation between the pixels and substrate.
Inventors:
Seifert, Andreas
Muralto, Paul
Muralto, Paul
Application Number:
JP2002517482A
Publication Date:
February 26, 2004
Filing Date:
July 06, 2001
Export Citation:
Assignee:
École Polytechnique Federal de Lausanne (Ape Fuel)
International Classes:
G01N21/35; G01J1/02; G01J5/02; G01J5/34; G01J5/48; H01L27/146; H01L37/02; (IPC1-7): G01J1/02; G01J5/02; H01L27/146; H01L37/02
Attorney, Agent or Firm:
Masaki Yamakawa