PYROELECTRIC TYPE INFRARED DETECTOR AND ITS MANUFACTURE

Title:

PYROELECTRIC TYPE INFRARED DETECTOR AND ITS MANUFACTURE

Document Type and Number:

Japanese Patent JPH08136343

Kind Code:

A

Abstract:

PURPOSE: To provide a pyroelectric type infrared detector showing high output sensitivity, being of low cost, small in size and excellent in productivity and having high reliability, and its manufacture.

CONSTITUTION: An infrared detecting element has a Pt thin film formed as an electrode 12a on an MgO substrate 11, a pyroelectric thin film 13 being the upper layer of this film and an NiCr thin film formed as an electrode 12b on these films and also has a body 14 of high resistance formed on the MgO substrate by a thin film forming method. Since the body 14 of high resistance is not fitted externally, space can be saved and, besides, the body 14 is subjected to heat treatment at the time of manufacture of the electrode 12b and others and made stable.

Inventors:

NAKANISHI TSUTOMU
MORISUGI KAZUJI
HOSOMI FUMIO
NOMURA KOJI

Application Number:

JP27359194A

Publication Date:

May 31, 1996

Filing Date:

November 08, 1994

Export Citation:

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Assignee:

MATSUSHITA ELECTRIC IND CO LTD

International Classes:

G01J1/02; G01J5/02; G01J5/34; H01L37/02; (IPC1-7): G01J1/02; G01J5/02; H01L37/02

Attorney, Agent or Firm:

Akira Kobiji (2 outside)

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