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Title:
QUANTUM WELL TYPE LASER DIODE
Document Type and Number:
Japanese Patent JPH05160515
Kind Code:
A
Abstract:

PURPOSE: To realize a strained quantum well type laser diode of higher reliability, by making the lattice constant of a quantum well active layer differ from that of a barrier layer by a specified amount, and setting the lattice orientation of the quantum well active layer to the neighborhood of (111).

CONSTITUTION: On an N-GaAs substrate 1 having the face orientation shifted by 0.5° from the (111) B face toward the (100) face, each of the layers 2-10 is continuously formed by using a molecular beam epitaxy method. In this process, A GaAs and Inlays are formed under the optimum conditions, at a high growth temperature and a low growth temperature, respectively. The lattice constant of a quantum well active layer 6 is made different of the lattice constant of a barrier layer 5 adjacent to the quantum well active layer 6 by 0.1% or more, and the lattice orientation of the active layer 6 is set to the vicinity of (111). In the above strained quantum well type laser diode, stress is applied parallel to the quantum well layer, but deterioration of the interface can be restrained by setting the lattice orientation of the active layer to be in the neighborhood of (111).


Inventors:
HAYAKAWA TOSHIRO
Application Number:
JP32039191A
Publication Date:
June 25, 1993
Filing Date:
December 04, 1991
Export Citation:
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Assignee:
EASTMAN KODAK JAPAN
International Classes:
H01L21/20; H01L33/06; H01L33/14; H01L33/16; H01L33/24; H01L33/30; H01L33/40; H01L33/62; H01S5/00; H01S5/042; H01S5/34; H01S5/32; H01S5/343; (IPC1-7): H01L21/20; H01L33/00; H01S3/18
Attorney, Agent or Firm:
Kenji Yoshida (2 outside)