PURPOSE: To solve a problem that the end part of a core tube is heated to a high temperature by radiant heat of an infrares radiation with a joint member attached to the end part of the core tube by a method wherein a detachable quartz member which is the joint member and attached to the end part of the core tube main unit is made of translucent quartz glass containing fine voids of specific sizes.
CONSTITUTION: A core tube main unit is composed of a transparent quartz glass tube and a cover 12 which is made of semitransparent quartz glass containing fine voids having diameters of 15-1000μm is attached to the end part of the core tube main unit through which objects such as wafers to be subjected to a heat treatment are brought into and taken out of the core tube main unit. Further, a handle 13 is attached to the cover 12. With this constitution, the translucent quartz glass member containing the fine voids are less contaminated than the core tube main unit during the heat treatment. Moreover, the member is small is size and easy to handle and wash, so that it can be effectively used as a component for a repeated heat treatment of semiconductor wafers.
KIMURA HIROSHI
NAKAMURA KAZUO
KENMOCHI KATSUHIKO
| JP60129128B | ||||
| JPS6181648A | 1986-04-25 |